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Scientists at the Max Planck Institute for Intelligent Systems propose a method to measure the efficiency of soft MicroElectroMechanical System (MEMS) manufactured using Silicon-On-Insulator (SOI) technology. The device is actuated using ... "Bidirectional, Thin-Film Repulsive-/Attractive-Force A small ~1mm diameter mylar tube rolls across a flat row of electrodes. By putting a voltage across the electrodes (~500V), ... The EPFL Soft Transducers lab shows here sub-mm thick flexible hydraulically-amplified Summary: Inspired by the driving mechanism of biological muscles in nature, the research team first designed a micron-level ...
Electromagnetic micro pump. Rotatory micro pumps. Shape memory alloy based micro pumps.
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Soft electrostatic actuators reveal higher efficiency than expected
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Last Updated: May 23, 2026
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